LBNL Office of science Department of Energy

Ion Beam Technology Group

Lawrence Berkeley National Laboratory

Accelerator Technology & Applied Physics Division

Compact RF accelerator

Image of our new 112 aperature RF units


Prof Amit Lal at Cornell University SonicMEMS Lab


Funding is provided by ARPA-e logo.

Relevant publications:

(click on the years to see the publications) show all hide all


  • Peter A Seidl, Arun Persaud, Diego Di Domenico, Johan Andreasson, Qing Ji, Wei Liang, Di Ni, Daniel Oberson, Luke Raymond, Gregory Scharfstein, Alan M M Todd, Amit Lal and Thomas Schenkel Multi-beam RF accelerators for ion implantation (2018) journal web page bibtex
    @article{ Seidl2018-fa,
    title = "Multi-beam RF accelerators for ion implantation",
    month = "September",
    year = "2018",
    url = "",
    eprint = "arXiv:1809.08525",
    archivePrefix = "arXiv",
    primaryClass = "physics.acc-ph",
    arxivid = "1809.08525",
    author = "Peter A Seidl and Arun Persaud and Diego Di Domenico and Johan Andreasson and Qing Ji and Wei Liang and Di Ni and Daniel Oberson and Luke Raymond and Gregory Scharfstein and Alan M M Todd and Amit Lal and Thomas Schenkel",
  • K.B. Vinayakumar, A. Persaud, Q. Ji, P. Seidl, T. Schenkel and A. Lal Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation in IEEE proceedings of MEMS 2018 (2018) doi bibtex
    @inproceeding{ Vinaya2018,
    title = "Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation",
    booktitle = "IEEE proceedings of MEMS 2018",
    year = "2018",
    doi = "10.1109/MEMSYS.2018.8346681",
    eprint = "1802.02622",
    author = "K.B. Vinayakumar and A. Persaud and Q. Ji and P. Seidl and T. Schenkel and A. Lal",
  • P A Seidl, A Persaud, W Ghiorso, Q Ji, W L Waldron, A Lal, K B Vinayakumar and T Schenkel Source-to-accelerator quadrupole matching section for a compact linear accelerator Rev. Sci. Instrum. 89(5) 053302 (2018) doi journal web page bibtex
    @article{ Seidl2018-fh,
    title = "Source-to-accelerator quadrupole matching section for a compact linear accelerator",
    journal = "Rev. Sci. Instrum.",
    publisher = "American Institute of Physics",
    volume = "89",
    number = "5",
    pages = "053302",
    month = "May",
    year = "2018",
    url = "",
    issn = "0034-6748",
    doi = "10.1063/1.5023415",
    eprint = "arXiv:1802.00173",
    author = "P A Seidl and A Persaud and W Ghiorso and Q Ji and W L Waldron and A Lal and K B Vinayakumar and T Schenkel",


  • A. Persaud, P.A. Seidl, Q. Ji, E. Feinberg, W.L. Waldron, T. Schenkel, S. Ardanuc, K.B. Vinayakumar and A. Lal Staging of RF-accelerating units in a MEMS-based ion accelerator Physics Procedia 90 136--142 (2017) doi journal web page bibtex
    @article{ Persaud:CAARI-2016,
    title = "Staging of RF-accelerating units in a MEMS-based ion accelerator",
    eprint = "arxiv:1702.00460",
    year = "2017",
    journal = "Physics Procedia",
    volume = "90",
    pages = "136--142",
    doi = "10.1016/j.phpro.2017.09.040",
    url = "",
    author = "A. Persaud and P.A. Seidl and Q. Ji and E. Feinberg and W.L. Waldron and T. Schenkel and S. Ardanuc and K.B. Vinayakumar and A. Lal",