@article{ Seidl2018-fa,
title = "Multi-beam RF accelerators for ion implantation",
month = "September",
year = "2018",
url = "http://arxiv.org/abs/1809.08525",
eprint = "arXiv:1809.08525",
archivePrefix = "arXiv",
primaryClass = "physics.acc-ph",
arxivid = "1809.08525",
author = "Peter A Seidl and Arun Persaud and Diego Di Domenico and Johan Andreasson and Qing Ji and Wei Liang and Di Ni and Daniel Oberson and Luke Raymond and Gregory Scharfstein and Alan M M Todd and Amit Lal and Thomas Schenkel",
}

@inproceeding{ Vinaya2018,
title = "Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation",
booktitle = "IEEE proceedings of MEMS 2018",
year = "2018",
doi = "10.1109/MEMSYS.2018.8346681",
eprint = "1802.02622",
author = "K.B. Vinayakumar and A. Persaud and Q. Ji and P. Seidl and T. Schenkel and A. Lal",
}

@article{ Seidl2018-fh,
title = "Source-to-accelerator quadrupole matching section for a compact linear accelerator",
journal = "Rev. Sci. Instrum.",
publisher = "American Institute of Physics",
volume = "89",
number = "5",
pages = "053302",
month = "May",
year = "2018",
url = "https://doi.org/10.1063/1.5023415",
issn = "0034-6748",
doi = "10.1063/1.5023415",
eprint = "arXiv:1802.00173",
author = "P A Seidl and A Persaud and W Ghiorso and Q Ji and W L Waldron and A Lal and K B Vinayakumar and T Schenkel",
}

@article{ Stepanov:NDCXII,
title = "Optimizing beam transport in rapidly compressing beams on the neutralized drift compression experiment – II",
journal = "Matter and Radiation at Extremes",
volume = "3",
number = "2",
pages = "78--84",
year = "2018",
note = "Heavy-ion-driven fusion and HEDP (II)",
issn = "2468-080X",
doi = "10.1016/j.mre.2018.01.001",
url = "http://www.sciencedirect.com/science/article/pii/S2468080X17301048",
eprint = "arXiv:1711.00539",
author = "Anton D. Stepanov and John J. Barnard and Alex Friedman and Erik P. Gilson and David P. Grote and Qing Ji and Igor D. Kaganovich and Arun Persaud and Peter A. Seidl and Thomas Schenkel",
}

@article{ Bielejec:2017,
title = "Short Intense Ion Pulses for Radiation Effects Research Using NDCX-II and BELLA-i.",
journal = "HEART 2017 conference",
place = "United States",
year = "2017",
month = "4",
author = "B.A. Ludewigt and P.A. Seidl and A. Persaud and Q. Ji and S. Steinke and S.S. Bulanov and K. Nakamura and W.P. Leemans and T. Schenkel and E.S. Bielejec and A. Friedman and J.J. Barnard",
}

@article{ Lake:YBCO,
title = "Patterned Electron Beam Exposures of YBCO – Towards Local Control of Doping",
journal = "Physics Procedia",
volume = "90",
number = "Supplement C",
pages = "381--384",
year = "2017",
note = "Conference on the Application of Accelerators in Research and Industry, CAARI 2016, 30 October – 4 November 2016, Ft. Worth, TX, USA",
issn = "1875-3892",
doi = "10.1016/j.phpro.2017.09.037",
url = "http://www.sciencedirect.com/science/article/pii/S1875389217301967",
keywords = "high T superconductivity, electron beams, doping",
author = "R.E. Lake and A. Mueller and H. Pan and A. Persaud and B.A. Ludewigt and V.Z. Kresin and A.M. Minor and P.A. Seidl and T. Schenkel",
}

@article{ Persaud:RSI-2016,
title = "A compact linear accelerator based on a scalable microelectromechanical-system RF-structure",
journal = "Review of Scientific Instruments",
volume = "88",
pages = "063304",
year = "2017",
eprint = "arXiv:1610.09723",
doi = "10.1063/1.4984969",
author = "A. Persaud and Q. Ji and E. Feinberg and P.A. Seidl and W.L. Waldron and T. Schenkel and A. Lal and K.B. Vinayakumar and S. Ardanuc and D.A. Hammer",
}

@article{ Persaud:CAARI-2016,
title = "Staging of RF-accelerating units in a MEMS-based ion accelerator",
eprint = "arxiv:1702.00460",
year = "2017",
journal = "Physics Procedia",
volume = "90",
pages = "136--142",
doi = "10.1016/j.phpro.2017.09.040",
url = "http://www.sciencedirect.com/science/article/pii/S1875389217301992",
author = "A. Persaud and P.A. Seidl and Q. Ji and E. Feinberg and W.L. Waldron and T. Schenkel and S. Ardanuc and K.B. Vinayakumar and A. Lal",
}

@article{ Seidle-NAPAC16,
title = "Recent Experiments At Ndcx-II: Irradiation Of Materials Using Short, Intense Ion Beams",
eprint = "arXiv:1610.05253",
year = "2016",
author = "P.A. Seidl and Q. Ji and A. Persaud and E. Feinberg and B. Ludewigt and M. Silverman and A. Sulyman and W.L. Waldron and T. Schenkel and J.J. Barnard and A. Friedman and D.P. Grote and E.P. Gilson and I.D. Kaganovich and A. Stepanov and F. Treffert and M. Zimmer",
}

@inproceedings{ Seidl-GSI-HEDgeHOB-2016,
title = "Recent Results with Short-Pulse, Compressed Ion Beams at the Neutralized Drift Compression Experiment",
year = "2016",
organization = "GSI",
booktitle = "High Energy Density generated by Heavy Ion and Laser Beams, HEDgeHOB Collaboration at FAIR - Report 2014/2015",
month = "April",
URL = "https://indico.gsi.de/getFile.py/access?resId=0&materialId=17&confId=3206",
author = "P.A. Seidl and J.J. Barnard and R.C. Davidson and A. Friedman and E.P. Gilson and D. Grote and Q. Ji and I.D. Kaganovich and A. Persaud and W.L. Waldron and T. Schenkel",
}

@article{ Ji:RoSI-87-02B707,
title = "Development and testing of a pulsed helium ion source for probing materials and warm dense matter studies",
journal = "Review of Scientific Instruments",
volume = "87",
issue = "2",
pages = "02B707",
doi = "10.1063/1.4932569",
year = "2016",
author = "Q. Ji and P.A. Seidl and W.L. Waldron and J.H. Takakuwa and A. Friedman and D.P. Grote and A. Persaud and J.J. Barnard and T. Schenkel",
}

@inproceedigns{ Seidl-IFSA-2015,
title = "Short-pulse, compressed ion beams at the Neutralized Drift Compression Experiment",
journal = "Journal of Physics: Conference Series",
eprint = "arXiv:160.01732",
year = "2016",
volume = "717",
number = "1",
pages = "012079",
url = "http://stacks.iop.org/1742-6596/717/i=1/a=012079",
doi = "10.1088/1742-6596/717/1/012079",
author = "P.A. Seidl and J.J. Barnard and R.C. Davidson and A. Friedman and E.P. Gilson and D. Grote and Q. Ji and I.D. Kaganovich and A. Persaud and W.L. Waldron and T. Schenkel",
}

@article{ Seidl:NIMA-800-98,
title = "Short intense ion pulses for materials and warm dense matter research",
journal = "Nuclear Instruments and Methods in Physics Research A",
year = "2015",
volume = "800",
pages = "98--103",
doi = "10.1016/j.nima.2015.08.01",
author = "P.A. Seidl and A. Persaud and W. L. Waldron and J.J. Barnard and R. C. Davidson and A. Friedman and E. P. Gilson and W. G. Greenway and D.P. Grote and I.D. Kaganovich and S. M. Lidia and M. Stettler and J.H. Takakuwa and T. Schenkel",
}

@inproceedings{ Seidl-GSI-HEDgeHOB-2015,
title = "Short-Pulse Ion Beams for Discovery Science at Berkeley Lab",
year = "2015",
organization = "GSI",
booktitle = "High Energy Density generated by Heavy Ion and Laser Beams, HEDgeHOB Collaboration at FAIR - Report 2013/2014",
month = "April",
URL = "https://indico.gsi.de/getFile.py/access?resId=0&materialId=17&confId=3206",
author = "P.A. Seidl and A. Persaud and T. Schenkel and W.L. Waldron and H. Guo and J.J. Barnard and A. Friedman and D.Grote and R. Davidson and E. Gilson and I. Kaganovich",
}

@inproceedings{ Schenkel:AIP-1640-124,
titel = "Deterministic doping and the exploration of spin qubits",
booktitle = "the XII International Symposium on Electron beam Ion Sources and Traps",
note = "the XII International Symposium on Electron beam Ion Sources and Traps, East Lansing, Michigan, US, 18-21 May 2014,",
address = "East Lansing, Michigan, US",
organization = "AIP Conference Proceedings",
publisher = "AIP",
year = "2015",
pages = "124--1248",
volume = "1640",
doi = "10.1063/1.4905409",
author = "T. Schenkel and C.D. Weis and C.C. Lo and A. Persaud and I. Chakarov and D.H. Schneider and J.Bokor",
}

@article{ Persaud:PP-66-604,
title = "Accessing defect dynamics using intense, nanosecond pulsed ion beams",
journal = "Physics Procedia",
doi = "10.1016/j.phpro.2015.05.080",
volume = "66C",
pages = "604--609",
year = "2015",
eprint = "cond-mat/1409.2565",
author = "A. Persaud and J.J. Barnard and H. Guo and P. Hosemann and S. Lidia and A. M. Minor and P.A. Seidl and T. Schenkel",
}

@inproceedings{ OPL:9347027,
title = "Dynamic investigation of defects induced by short, high current pulses of high energy lithium ions",
booktitle = "Symposium ZZ/AAA/BBB - Recent Advances in the Structural Characterization of Materials",
series = "MRS Proceedings",
volume = "1712",
year = "2014",
doi = "10.1557/opl.2014.856",
URL = "http://journals.cambridge.org/article_S1946427414008562",
author = "Hua Guo and Arun Persaud and Steve Lidia and Andrew M. Minor and P. Hosemann and Peter A. Seidl and Thomas Schenkel",
}

@article{ Sy:AIP-1525-123,
title = "Ion source and beam guiding studies for an API neutron generator",
journal = "AIP Conf. Proc.",
volume = "1525",
pages = "123",
year = "2013",
doi = "10.1063/1.4802304",
author = "A. Sy and Q. Ji and A. Persaud and B. A. Ludewigt and T. Schenkel",
}

@article{ Weis:Nature-497-46,
journal = "Nature",
title = "Solid-state physics: Single spins in silicon see the light",
pages = "46--47",
volume = "497",
year = "2013",
doi = "10.1038/497046a",
url = "http://www.nature.com/nature/journal/v497/n7447/full/497046a.html",
author = "C. D. Weis and T. Schenkel",
}

@article{ Waldmann:TSF-534-488,
journal = "Thin Solid Films",
title = "Effects of palladium coating on field-emission properties of carbon nanofibers in a hydrogen plasma",
pages = "488--491",
volume = "534",
year = "2013",
doi = "10.1016/j.tsf.2013.02.053",
url = "http://www.sciencedirect.com/science/article/pii/S0040609013003027",
author = "Ole Waldmann and Arun Persaud and Rehan Kapadia and Kuniharu Takei and Frances I. Allen and Ali Javey and Thomas Schenkel",
}

@article{ Ilg:JVSTB-30-06FD04,
title = "Improved single ion implantation with scanning probe alignment",
journal = "Journal of Vacuum Science and Technology B",
issn = "21662746",
year = "2012",
volume = "30",
number = "6",
pages = "06FD04",
url = "http://link.aip.org/link/JVTBD9/v30/i6/p06FD04/s1&Agg=doi",
doi = "10.1116/1.4767233",
author = "Michael Ilg and Christoph&nbsp;D Weis and Julian Schwartz and Arun Persaud and Qing Ji and Cheuk <span class="bibtex-protected">Chi Lo</span> and Jeffrey Bokor and Alex Hegyi and Elshad Guliyev and Ivo&nbsp;W. Rangelow and Thomas Schenkel",
}

@article{ Weis:APL-100-172104,
journal = "Appl. Phys. Lett.",
title = "Electrical activation and electron spin resonance measurements of implanted bismuth in isotopically enriched silicon-28",
number = "17",
pages = "172104",
volume = "100",
year = "2012",
doi = "10.1063/1.4704561",
url = "http://apl.aip.org/resource/1/applab/v100/i17/p172104_s1",
author = "C.&nbsp;D. Weis and C.&nbsp;C. Lo and V.&nbsp;Lang and A.&nbsp;M. Tyryshkin and R.&nbsp;E. George and K.&nbsp;M. Yu and J.&nbsp;Bokor and S.&nbsp;A. Lyon and J.&nbsp;J.&nbsp;L. Morton and T.&nbsp;Schenkel",
}

@article{ Lo:APL-100-063510,
journal = "Appl. Phys. Lett.",
title = "Suppression of microwave rectification effects in electrically detected magnetic resonance measurements",
number = "6",
pages = "063510",
volume = "100",
year = "2012",
doi = "10.1063/1.3684247",
url = "http://apl.aip.org/resource/1/applab/v100/i6/p063510_s1",
author = "C.&nbsp;C. Lo and F.&nbsp;R. Bradbury and A.&nbsp;M. Tyryshkin and C.&nbsp;D. Weis and J.&nbsp;Bokor and T.&nbsp;Schenkel and S.&nbsp;A. Lyon",
}

@article{ Sy:RoSI-83-02B309,
title = "Novel methods for improvement of a Penning ion source for neutron generator applications",
journal = "Review of Scientific Instruments",
year = "2012",
volume = "83",
pages = "02B309",
url = "http://link.aip.org/link/?RSI/83/02B309",
doi = "10.1063/1.3670744",
author = "A.&nbsp;Sy and Q.&nbsp;Ji and A.&nbsp;Persaud and O.&nbsp;Waldmann and T.&nbsp;Schenkel",
}

@article{ Persaud:RoSI-83-02B312,
title = "A compact neutron generator using a field ionization source",
journal = "Review of Scientific Instruments",
year = "2012",
volume = "83",
pages = "02B312",
url = "http://link.aip.org/link/?RSI/83/02B312",
doi = "10.1063/1.3672437",
author = "Arun Persaud and Ole Waldmann and Rehan Kapadia and Kuniharu Takei and Ali Javey and Thomas Schenkel",
}

@article{ Persaud:JVSTB-29-02B107,
eprint = "arXiv:1010.2252",
title = "Development of a compact neutron source based on field ionization processes",
year = "2011",
journal = "Journal of Vacuum Science and Technology B",
volume = "29",
pages = "02B107",
doi = "10.1116/1.3531929",
url = "http://avspublications.org/jvstb/resource/1/jvtbd9/v29/i2/p02B107_s1",
author = "Arun Persaud and Ian Allen and Michael&nbsp;R. Dickinson and Thomas Schenkel and Rehan Kapadia and Kuniharu Takei and Ali Javey",
}

@article{ Bond:SEG-29-518,
title = "Nuclear Source Replacement in Petrochemical Well-Logging",
journal = "SEG Expanded Abstracts",
pages = "518--522",
volume = "29",
year = "2010",
url = "http://link.aip.org/link/?SEGEAB/29/518/1",
doi = "10.1190/1.3513833",
author = "Leonard&nbsp;J Bond and Jeffrey&nbsp;W Griffin and Kayte&nbsp;M Denslow and Robert&nbsp;V Harris and Thomas Schenkel and A.&nbsp;Persaud and Gregory&nbsp;E Dale and Avneet Sood and James&nbsp;T Rutledge and Scott Kovaleski and Frances Keel",
}

@article{ Toyli:NL-10-3168,
journal = "Nano Lett.",
title = "Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond",
abstract = "We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.",
number = "8",
pages = "3168--3172",
volume = "10",
year = "2010",
doi = "10.1021/nl102066q",
author = "David&nbsp;M. Toyli and Christoph&nbsp;D. Weis and Gregory&nbsp;D. Fuchs and Thomas Schenkel and David&nbsp;D. Awschalom",
}

@article{ Fuchs:NP-9-668,
journal = "Nature Physics",
title = "Excited-state spin coherence of a single nitrogen-vacancy centre in diamond",
abstract = "Nitrogen-vacancy centres in diamond are a solid-state analogue of trapped atoms, with fine structure in both the ground and excited states that may be used for advanced quantum control. These centres are promising candidates for spin-based quantum information processing1-3 and magnetometry4-6 at room temperature. Knowledge of the excited-state (ES) structure and coherence is critical to evaluating the ES as a room-temperature quantum resource, for example for a fast, optically gated swap operation with a nuclear-spin memory(7). Here we report experiments that probe the ES-spin coherence of single nitrogen-vacancy centres. Using a combination of pulsed-laser excitation and nanosecond-scale microwave manipulation, we observed ES Rabi oscillations, and multipulse resonant control enabled us to study coherent ES electron/nuclear-spin interactions. To understand these processes, we developed a finite-temperature theory of ES spin dynamics that also provides a pathway towards engineering longer ES spin coherence.",
number = "9",
pages = "668--672",
volume = "6",
year = "2010",
doi = "10.1038/NPHYS1716",
author = "G.&nbsp;D. Fuchs and V.&nbsp;V. Dobrovitski and D.&nbsp;M. Toyli and F.&nbsp;J. Heremans and C.&nbsp;D. Weis and Thomas Schenkel and D.&nbsp;D. Awschalom",
}

@article{ Lo:SST-24-105022,
title = "Device fabrication and transport measurements of FinFETs built with $^28$Si SOI wafers towards donor qubits in silicon",
eprint = "arXiv:0906.1995v1",
journal = "Semiconductor Science and Technology",
volume = "24",
number = "10",
pages = "105022",
url = "http://stacks.iop.org/0268-1242/24/105022",
year = "2009",
doi = "10.1088/0268-1242/24/10/105022",
author = "C.C. Lo and A.&nbsp;Persaud and S.&nbsp;Duhey and D.&nbsp;Olynick and F.&nbsp;Borondics and M.C. Martin and H.A. Bechtel and J.&nbsp;Bokor and T.&nbsp;Schenkel",
}

@article{ Schenkel:NIMB-267-2563,
title = "Critical issues in the formation of quantum computer test structures by ion implantation",
abstract = "The formation of quantum computer test structures in silicon by ion implantation enables the characterization of spin readout mechanisms with ensembles of dopant atoms and the development of single atom devices. We briefly review recent results in the characterization of spin dependent transport and single ion doping and then discuss the diffusion and segregation behaviour of phosphorus, antimony and bismuth ions from low fluence, low energy implantations as characterized through depth profiling by secondary ion mass spectrometry (SIMS). Both phosphorus and bismuth are found to segregate to the SiO2/Si interface during activation anneals, while antimony diffusion is found to be minimal. An effect of the ion charge state on the range of antimony ions, Sb-121(25+), in SiO2/Si is also discussed. (C) 2009 Elsevier B. V. All rights reserved.",
eprint = "arXiv:0904.4688v1",
journal = "Nuclear Instruments and Methods in Physics Research B",
year = "2009",
volume = "267",
number = "16",
pages = "2563--2566",
doi = "10.1016/j.nimb.2009.05.061",
author = "T.&nbsp;Schenkel and C.C. Lo and C.D. Weis and A.&nbsp;Schuh and A.&nbsp;Persaud and J.&nbsp;Bokor",
}

@article{ Sideras-Haddad:NIMB-267-2774,
title = "Possible diamond-like nanoscale structures induced by slow highly-charged ions on graphite (HOPG)",
abstract = "The interaction between slow highly-charged ions (SHCI) of different charge states from an electron-beam ion trap and highly-oriented pyrolytic graphite (HOPG) surfaces is studied in terms of modification of electronic states at single-ion impact nanosize areas. Results are presented from AFM/STM analysis of the induced-surface topological features combined with Raman spectroscopy. I-V characteristics for a number of different impact regions were measured with STM and the results argue for possible formation of diamond-like nanoscale structures at the impact sites. (C) 2009 Published by Elsevier B. V.",
journal = "Nuclear Instruments and Methods in Physics Research B",
year = "2009",
volume = "267",
number = "16",
pages = "2774--2777",
doi = "10.1016/j.nimb.2009.05.060",
author = "E.&nbsp;Sideras-Haddad and T.&nbsp;Schenkel and S.&nbsp;Shrivastava and T.&nbsp;Makgato and A.&nbsp;Batra and C.D. Weis and A.&nbsp;Persaud and R.&nbsp;Erasmus and B.&nbsp;Mwakikunga",
}

@article{ Weis:NIMB-267-1222,
title = "Mapping of ion beam induced current changes in FinFETs",
abstract = "We report on progress in ion placement into silicon devices with scanning probe alignment. The device is imaged with a scanning force microscope (SFM) and an aligned argon beam (20 keV, 36 keV) is scanned over the transistor surface. Holes in the lever of the SFM tip collimate the argon beam to sizes of 1.6 mu m and 100 nm in diameter. Ion impacts upset the channel current due to formation of positive charges in the oxide areas. The induced changes in the source-drain current are recorded in dependence of the ion beam position with respect to the FinFET. Maps of local areas responding to the ion beam are obtained. (C) 2009 Elsevier B.V. All rights reserved.",
journal = "Nuclear Instruments and Methods in Physics Research B",
year = "2009",
volume = "267",
number = "8--9",
pages = "1222--1225",
doi = "10.1016/j.nimb.2009.01.019",
eprint = "arXiv:0809.2113v2",
author = "C.D. Weis and A.&nbsp;Schuh and A.&nbsp;Batra and A.&nbsp;Persaud and I.W. Rangelow and J.&nbsp;Bokor and C.C. Lo and S.&nbsp;Cabrini and D.&nbsp;Olynick and S.&nbsp;Duhey and T.&nbsp;Schenkel",
}

@article{ Fuchs:PRL-101-117601,
title = "Excited-State Spectroscopy Using Single Spin Manipulation in Diamond",
abstract = "We use single-spin resonant spectroscopy to study the spin structure in the orbital excited state of a diamond nitrogen-vacancy (N-V) center at room temperature. The data show that the excited-state spin levels have a zero-field splitting that is approximately half of the value of the ground state levels, a g factor similar to the ground state value, and a hyperfine splitting similar to 20x larger than in the ground state. In addition, the width of the resonances reflects the electronic lifetime in the excited state. We also show that the spin level splitting can significantly differ between N-V centers, likely due to the effects of local strain, which provides a pathway to control over the spin Hamiltonian and may be useful for quantum-information processing.",
journal = "Physical Review Letters",
volume = "101",
number = "11",
pages = "117601",
year = "2008",
doi = "10.1103/PhysRevLett.101.117601",
author = "G.D. Fuchs and V.V. Dobrovitski and R.&nbsp;Hanson and A.&nbsp;Batra and C.D. Weis and T.&nbsp;Schenkel and D.D. Awschalom",
}

@article{ Morton:Nature-455-1085,
title = "Solid-state quantum memory using the $^31$P nuclear spin",
journal = "Nature",
volume = "455(23)",
pages = "1085--1088",
year = "2008",
doi = "10.1038/nature07295",
url = "https://www.nature.com/articles/nature07295",
author = "J.J.L. Morton and A.M. Tyryshkin and R.M. Brown and S.&nbsp;Shankar and B.W. Lovett and A.&nbsp;Ardavan and T.&nbsp;Schenkel and E.E. Haller and J.W. Ager and S.A. Lyon",
}

@article{ Saraovar:PRB-78-245302,
title = "Quantum nondemolition measurements of single donor spins in semiconductors",
journal = "Physical Review B",
volume = "78",
pages = "245302",
year = "2008",
doi = "10.1103/PhysRevB.78.245302",
url = "http://link.aps.org/doi/10.1103/PhysRevB.78.245302",
author = "M.&nbsp;Sarovar and K.C. Young and T.&nbsp;Schenkel and K.B. Whaley",
}

@article{ Weis:JVST-26-2596,
title = "Single atom doping for quantum device development in diamond and silicon",
abstract = "The ability to inject dopant atoms with high spatial resolution, flexibility in dopant species, and high single ion detection fidelity opens opportunities for the study of dopant fluctuation effects and the development of devices in which function is based on the manipulation of quantum states in single atoms, such as proposed quantum computers. The authors describe a single atom injector, in which the imaging and alignment capabilities of a scanning force microscope (SFM) are integrated with ion beams from a series of ion sources and with sensitive detection of current transients induced by incident ions. Ion beams are collimated by a small hole in the SFM tip and current changes induced by single ion impacts in transistor channels enable reliable detection of single ion hits. They discuss resolution limiting factors in ion placement and processing and paths to single atom (and color center) array formation for systematic testing of quantum computer architectures in silicon and diamond.",
journal = "Journal of Vacuum Science and Technology B",
volume = "26",
number = "6",
pages = "2596--2600",
year = "2008",
doi = "10.1116/1.2968614",
author = "C.D. Weis and A.&nbsp;Schuh and A.&nbsp;Batra and A.&nbsp;Persaud and I.W. Rangelow and J.&nbsp;Bokor and C.C. Lo and S.&nbsp;Cabrini and E.&nbsp;Sideras-Haddad and G.D. Fuchs and R.&nbsp;Hanson and D.D. Awschalom and T.&nbsp;Schenkel",
}

@article{ Batra:APL-91-193502,
title = "Detection of low energy single ion impacts in micron scale transistors at room temperature",
journal = "Applied Physics Letters",
abstract = "We report the detection of single ion impacts through monitoring of changes in the source-drain currents of field effect transistors at room temperature. Implant apertures are formed in the interlayer dielectrics and gate electrodes of planar, microscale transistors by electron beam assisted etching. Device currents increase due to the generation of positively charged defects in gate oxides when ions (Sb-121(12+,14+) and Xe6+; 50-70 keV) impinge into channel regions. Implant damage is repaired by rapid thermal annealing, enabling iterative cycles of device doping and electrical characterization for the development of single atom devices and studies of dopant fluctuation effects.",
doi = "10.1063/1.2805634",
year = "2007",
volume = "91",
number = "19",
pages = "193502",
author = "A.&nbsp;Batra and C.D. Weis and J.&nbsp;Reijonen and A.&nbsp;Persaud and S.&nbsp;Cabrini and C.C. Lo and J.&nbsp;Bokor and T.&nbsp;Schenkel",
}

@article{ Chai:APL-91-103101,
title = "Electron transport through single carbon nanotubes",
journal = "Applied Physics Letters",
volume = "91",
pages = "103101",
year = "2007",
url = "https://aip.scitation.org/doi/abs/10.1063/1.2778551",
doi = "10.1063/1.2778551",
author = "G.&nbsp;Chai and H.&nbsp;Heinrich and L.&nbsp;Chow and T.&nbsp;Schenkel",
}

@article{ Lo:APL-91-242106,
title = "Spin-Dependent Scattering off Neutral Antimony Donors in 28Si Field-Effect Transistors",
journal = "Applied Physics Letters",
volume = "91",
pages = "242106",
url = "https://aip.scitation.org/doi/abs/10.1063/1.2817966",
doi = "10.1063/1.2817966",
year = "2007",
author = "C.C. Lo and J.&nbsp;Bokor and T.&nbsp;Schenkel and A.M. Tyryshkin and S.A. Lyon",
}

@article{ MoberlyChan:MRS-32-424,
title = "Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface",
journal = "MRS Bulletin",
volume = "32(5)",
pages = "424",
year = "2007",
doi = "10.1557/mrs2007.66",
author = "W.J. MoberlyChan and D.P. Adams and M.J. Aziz and G.&nbsp;Hobler and T.&nbsp;Schenkel",
}

@article{ Robinson:APL-91-122105,
title = "Low-temperature charge transport in Ga-acceptor nanowires implanted by focused-ion beams",
journal = "Applied Physics Letters",
volume = "91",
pages = "122105",
year = "2007",
doi = "10.1063/1.2786014",
url = "https://aip.scitation.org/doi/abs/10.1063/1.2786014",
author = "S.J. Robinson and C.L. Perkins and T.C. Shen and J.R. Tucker and T.&nbsp;Schenkel and X.W. Wang and T.P. Ma",
}

@article{ Schneider:NIMB-239-2007,
title = "Electromagnetically confined plasma target for interaction studies with intense laser fields",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "261",
pages = "239",
year = "2007",
doi = "10.1016/j.nimb.2007.03.102",
url = "https://www.sciencedirect.com/science/article/pii/S0168583X07005915",
author = "D.&nbsp;Schneider and J.&nbsp;McDonald and B.&nbsp;Zielbauer and D.&nbsp;Ursescu and U.&nbsp;Spillmann and T.&nbsp;Stoelker and T.&nbsp;Kuehl and T.&nbsp;Schenkel and G.&nbsp;Andler and E.&nbsp;Lindroth and R.&nbsp;Schuch",
}

@article{ Sideras-Haddad:NIMB-256-464,
title = "Electron emission and defect formation in the interaction of slow, highly charged ions with diamond surfaces",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "256",
number = "1",
pages = "464--467",
year = "2007",
doi = "10.1016/j.nimb.2006.12.098",
url = "https://www.sciencedirect.com/science/article/pii/S0168583X06012900",
author = "E.&nbsp;Sideras-Haddad and T.&nbsp;Schenkel and D.B. Rebuli and A.&nbsp;Persaud and S.&nbsp;Shrivastava and D.H. Schneider and B.&nbsp;Mwakikunga",
}

@article{ Allen:NIMB-244-323,
title = "Transport of Multiply and Highly Charged Ions through Nanoscale Apertures in Silicon Nitride Membranes",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "244",
number = "2",
pages = "323--326",
year = "2006",
author = "F.I. Allen and A.&nbsp;Persaud and S.J. Park and A.&nbsp;Minor and M.&nbsp;Sakurai and D.H. Schneider and T.&nbsp;Schenkel",
}

@article{ Bradbury:PRL-97-176404,
title = "Stark Tuning of Donor Electron Spins in Silicon",
eprint = "cond-mat/0603324",
journal = "Physical Review Letters",
volume = "97",
pages = "176404",
year = "2006",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.97.176404",
doi = "10.1103/PhysRevLett.97.176404",
author = "F.R. Bradbury and A.M. Tyryshkin and G.&nbsp;Sabouret and J.&nbsp;Bokor and T.&nbsp;Schenkel and S.&nbsp;A. Lyon",
}

@article{ Persaud:JVSTB-24-3148,
title = "Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation",
journal = "Journal of Vacuum Science and Technology B",
volume = "24",
number = "6",
pages = "3148--3151",
year = "2006",
author = "A.&nbsp;Persaud and K.&nbsp;Ivanova and Y.&nbsp;Sarov and Tzv. Ivanov and B.E. Volland and I.W. Rangelow and N.&nbsp;Nikolov and T.&nbsp;Schenkel and V.&nbsp;Djakov and D.W.K. Jenkins and J.&nbsp;Meijer and T.&nbsp;Vogel",
}

@article{ Schenkel:APL-88-112101,
title = "Electrical activation and spin coherence of ultra low dose antimony implants in silicon",
eprint = "cond-mat/0507318",
journal = "Applied Physics Letters",
volume = "88",
number = "11",
pages = "112101",
year = "2006",
author = "T.&nbsp;Schenkel and A.M. Tyryshkin and R.&nbsp;de&nbsp;Sousa and K.B. Whaley and J.&nbsp;Bokor and J.A. Liddle and A.&nbsp;Persaud and J.&nbsp;Shangkuan and I.&nbsp;Chakarov and S.&nbsp;A. Lyon",
}

@article{ Schenkel:ME-83-1814,
title = "Strategies for integration of donor electron spin qubits",
journal = "Microelectronic Engineering",
volume = "83",
number = "4--9",
pages = "1814--1817",
year = "2006",
author = "T.&nbsp;Schenkel and J.A. Liddle and J.&nbsp;Bokor and A.&nbsp;Persaud and S.J. Park and J.&nbsp;Shangkuan and C.C. Lo and S.&nbsp;Kwon and S.A. Lyon and A.M. Tyryshkin and I.W. Rangelow and Y.&nbsp;Sarov and D.H. Schneider and J.&nbsp;Ager and R.&nbsp;de&nbsp;Sousa",
}

@article{ Tyryshkin:PE-35-257,
title = "Electron Spin Coherence in Silicon",
journal = "Physica E",
volume = "35",
pages = "257--263",
year = "2006",
author = "A.M. Tyryshkin and S.A. Lyon and T.&nbsp;Schenkel and J.&nbsp;Bokor and J.&nbsp;Chu and W.&nbsp;Jantasch and F.&nbsp;Sch<span class="bibtex-protected">ä</span>ffler and J.L. Truitt and S.N. Coppersmith and M.A. Eriksson",
}

@article{ McDonald:NIMB-240-829,
title = "Material dependence of total electron emission yields following slow highly charged ion impact",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "240",
year = "2005",
doi = "doi:10.1016/j.nimb.2005.06.210",
pages = "829--833",
author = "J.W. McDonald and T.&nbsp;Schenkel and A.V. Hamza and D.H. Schneider",
}

@article{ Persaud:JoVSTB-23-2798,
title = "Ion implantation with scanning probe alignment",
journal = "Journal of Vacuum Science and Technology B",
year = "2005",
volume = "23",
number = "6",
pages = "2798--2800",
doi = "10.1116/1.2062628",
url = "http://avspublications.org/jvstb/resource/1/jvtbd9/v23/i6/p2798_s1",
author = "A.&nbsp;Persaud and T.&nbsp;Schenkel and J.&nbsp;Bokor and Tzv. Ivanov and I.W. Rangelow",
}

@article{ Persaud:NL-5-1087,
title = "Integration of scanning probes and ion beams",
year = "2005",
journal = "Nano Letters",
volume = "5",
number = "6",
pages = "1087--1091",
doi = "10.1021/nl0506103",
url = "http://pubs.acs.org/doi/abs/10.1021/nl0506103",
author = "A.&nbsp;Persaud and S.J. Park and J.A. Liddle and T.&nbsp;Schenkel and I.W. Rangelow",
}

@article{ Schenkel:NM-4-799,
title = "Semiconductor physics - Reliable performance",
journal = "Nature Materials",
year = "2005",
volume = "4",
pages = "799--800",
author = "T.&nbsp;Schenkel",
}

@article{ Grabiec:JVSTB-22-16,
title = "Batch fabricated scanning near field optical microscope/atomic force microscopy microprobe integrated with piezoresistive cantilever beam with highly reproducible focused ion beam micromachined aperture",
year = "2004",
journal = "Journal of Vacuum Science and Technology B",
volume = "22(1)",
pages = "16--21",
author = "P.&nbsp;Grabiec and J.&nbsp;Radojewski and M.&nbsp;Zaborowski and K.&nbsp;Domanski and T.&nbsp;Schenkel and I.W. Rangelow",
}

@article{ McDonald:UM-101-225,
title = "Surface charge compensation for a highly charged ion emission microscope",
year = "2004",
journal = "Ultramicroscopy",
volume = "101(2-4)",
pages = "225--229",
author = "J.W. McDonald and A.V. Hamza and M.W. Newman and J.P. Holder and D.H. Schneider and T.&nbsp;Schenkel",
}

@article{ Park:JVSTB-22-3115,
title = "Formation fo 15 nm scale Coloumb blockade structures in silicon by electron beam lithography with a bilayer resist process",
year = "2004",
journal = "Journal of Vacuum Science and Technology B",
volume = "22(6)",
pages = "3115--3118",
author = "S.J. Park and J.A. Liddle and A.&nbsp;Persaud and F.I. Allen and T.&nbsp;Schenkel and J.&nbsp;Bokor",
}

@article{ Park:ME-73-695,
title = "Processing issues in top-down approaches to quantum computer development in silicon",
year = "2004",
journal = "Microelectronic Engineering",
volume = "73--74",
pages = "695--700",
eprint = "cond-mat/0310195",
author = "S.J. Park and A.&nbsp;Persaud and J.A. Liddle and J.&nbsp;Nilsson and J.&nbsp;Bokor and D.H. Schneider and I.W. Rangelow and T.&nbsp;Schenkel",
}

@article{ Persaud:JVSTB-22-2992,
title = "Single ion implantation with scanning probe alignment",
year = "2004",
journal = "Journal of Vacuum Science and Technology B",
volume = "22",
number = "6",
pages = "2992--2994",
author = "A.&nbsp;Persaud and F.&nbsp;Allen and F.&nbsp;Gicquel and S.J. Park and J.A. Liddle and T.&nbsp;Schenkel and Tzv. Ivanov and K.&nbsp;Ivanova and I.W. Rangelow and J.&nbsp;Bokor",
}

@article{ Persaud:QIP-3-233,
title = "Quantum Computer Development with Single Ion Implantation",
year = "2004",
journal = "Quantum Information Processing",
volume = "3",
pages = "233--245",
author = "A.&nbsp;Persaud and S.J. Park and J.A. Liddle and I.W. Rangelow and J.&nbsp;Bokor and R.&nbsp;Keller and F.I. Allen and D.H. Schneider and T.&nbsp;Schenkel",
}

@article{ Schenkel:NIMB-219-200,
title = "Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation",
year = "2004",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "219--220",
pages = "200--205",
author = "T.&nbsp;Schenkel and I.W. Rangelow and R.&nbsp;Keller and S.J. Park and J.&nbsp;Nilsson and A.&nbsp;Persaud and V.R. Radmilovic and P.&nbsp;Grabiec and D.H. Schneider and J.A. Liddle and J.&nbsp;Bokor",
}

@article{ Shen:JVSTB-22-3182,
title = "Nanoscale electronics based on two-dimensional dopant patterns in sislicon",
year = "2004",
journal = "Journal of Vacuum Science and Technology B",
volume = "22(6)",
pages = "3182--3185",
author = "T.-C. Shen and J.S. Kline and T.&nbsp;Schenkel and S.J. Robinson and J.-Y. Ji and C.&nbsp;Yang and R.-R. Du and J.R. Tucker",
}

@article{ Schenkel:IJoMS-229-47,
title = "Probing nano-environments of peptide molecules on solid surfaces by highly charged ion secondary ion mass spectrometry",
year = "2003",
journal = "International Journal of Mass Spectroscopy",
volume = "229",
pages = "47--53",
author = "T.&nbsp;Schenkel and K.J. Wu",
}

@article{ Schenkel:JAP-94-7017,
title = "Solid state quantum computer development in silicon with single ion implantation",
year = "2003",
journal = "Journal of Applied Physics",
volume = "94",
number = "11",
doi = "10.1063/1.1622109",
pages = "7017--7024",
author = "T.&nbsp;Schenkel and A.&nbsp;Persaud and S.J. Park and J.&nbsp;Nilsson and J.&nbsp;Bokor and J.A. Liddle and R.&nbsp;Keller and D.H. Schneider and D.W. Cheng and D.E. Humphries",
}

@article{ Schenkel:JVSTB-21-2720,
title = "Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system",
year = "2003",
journal = "Journal of Vacuum Science and Technology B",
volume = "21(6)",
pages = "2720--2723",
author = "T.&nbsp;Schenkel and V.&nbsp;Radmilovic and E.A. Stach and S.J. Park and A.&nbsp;Persaud",
}

@article{ Machicoane:PRA-65-042903,
title = "Internal dielectronic excitation in highly charged ions colliding with surfaces",
year = "2002",
journal = "Physical Review A",
volume = "65",
pages = "042903",
url = "http://link.aps.org/doi/10.1103/PhysRevA.65.042903",
doi = "10.1103/PhysRevA.65.042903",
author = "G.A. Machicoane and T.&nbsp;Schenkel and T.R. Niedermayr and M.W. Newmann and A.V. Hamza and A.V. Barnes and J.W. McDonald and J.A. Tanis and D.H. Schneider",
}

@article{ Schenkel2002_RoSI,
title = "Extraction of highly charged ions from the electron beam ion trap at LBNL for applications in surface analysis and materials science",
year = "2002",
journal = "Review of Scientific Instruments",
volume = "73",
pages = "663-666",
author = "T.&nbsp;Schenkel and A.&nbsp;V. Hamza and J.&nbsp;P. Holder and K.&nbsp;Kr<span class="bibtex-protected">ä</span>mer and J.&nbsp;W. McDonald and A.&nbsp;Persaud and D.&nbsp;H. Schneider",
}

@inproceedings{ Schenkel2002_SPIE,
title = "Single Ion Implantation for Solid State Quantum Computer Development",
year = "2002",
booktitle = "SPIE V4656",
address = "San Jose",
organization = "SPIE",
doi = "10.1116/1.1518016",
eprint = "cond-mat/0201549",
author = "T.&nbsp;Schenkel and J.&nbsp;P. Holder and J.&nbsp;W. McDonald and J.&nbsp;Meijer and A.&nbsp;Persaud and D.&nbsp;H. Schneider",
}

@article{ Schenkel:JVSTB-20-2816,
title = "Single Ion Implantation for Solid State Quantum Computer Development",
year = "2002",
journal = "Journal of Vacuum Science and Technology B",
volume = "20",
number = "6",
pages = "2819--2823",
doi = "10.1116/1.1518016",
url = "https://avs.scitation.org/doi/abs/10.1116/1.1518016",
eprint = "cond-mat/0201549",
author = "T.&nbsp;Schenkel and A.&nbsp;Persaud and S.&nbsp;J. Park and J.&nbsp;Meijer and J.&nbsp;R. Kinglsey and J.&nbsp;W. McDonald and J.&nbsp;P. Holder and J.&nbsp;Bokor and D.&nbsp;H. Schneider",
}

@article{ Schenkel:RR-158-368,
title = "A focused heavy-ion beam system for high-LET studies of cells",
year = "2002",
journal = "Radiation Research",
volume = "158",
number = "3",
pages = "368",
url = "http://www.rrjournal.org/doi/abs/10.1667/0033-7587%282002%29158%5B0365%3APOTIWM%5D2.0.CO%3B2",
author = "T.&nbsp;Schenkel and J.&nbsp;Reijonen and A.&nbsp;Persaud and A.&nbsp;Kr<span class="bibtex-protected">ä</span>mer and K.N. Leung and R.A. Gough and W.A. Barletta and E.A. Blakely",
}

@article{ Hamza2002_APL,
title = "Light-emitting nanostructers formed by intense, ultrafast electronic excitation in silicon (100)",
year = "2001",
journal = "Applied Physics Letters",
volume = "79",
pages = "2973-2975",
author = "A.V. Hamza and M.W. Newman and P.A. Thielen and H.W.H. Lee and T.&nbsp;Schenkel and J.W. McDonald and D.H. Schneider",
}

@article{ Schenkel2001_PhysScr,
title = "Transport of Hollow Atoms Through Thin Dielectric Films",
year = "2001",
journal = "Physica Scripta",
volume = "T92",
doi = "10.1238/Physica.Topical.092a00208",
pages = "208-210",
author = "T.&nbsp;Schenkel and A.V. Hamza and M.W. Newman and G.&nbsp;Machicoane and J.W. McDonald and D.H. Schneider and K.J. Wu and V.Kh. Lichtenstein",
}

@inproceedings{ Schenkel2001_SPIE,
title = "Highly Charged Ion -- Secondary Ion Mass Spectrometry (HCI--SIMS): Towards Metrology Solutions for sub 100 nm Technology Nodes",
year = "2001",
doi = "10.1117/12.452558",
booktitle = "SPIE V4468",
author = "T.&nbsp;Schenkel and A.&nbsp;Kr<span class="bibtex-protected">ä</span>mer and K.-N. Leung and A.V. Hamza and J.W. McDonald and D.H. Schneider",
}

@article{ McDonald2001_JEM,
title = "Effects of Radiation on 1,3,5-Triamino-2,4,6-Trinitrobenzene (TATB) Studied by Time-of-Flight Secondary Ion Mass Spectrometry",
year = "2001",
journal = "Journal of Energetic Materials V",
volume = "19/2-3",
pages = "101",
DOI = "",
author = "J.W. McDonald and T.&nbsp;Schenkel and M.W. Newman and G.&nbsp;Overturf and H.&nbsp;Gregg and T.R. Niedermayr and A.V. Barnes and D.H. Schneider and I.&nbsp;A. Mowat",
}

@article{ Doyle2001_NIMB,
title = "Nuclear Emission Microscopies",
year = "2001",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "181",
pages = "199",
DOI = "10.1016/S0168-583X(01)00535-3",
author = "B.L. Doyle and D.S. Walsh and S.N. Renfrow and G.&nbsp;Vizkelethy and T.&nbsp;Schenkel and A.V. Hamza",
}

@article{ Hamza2000_RoSI,
title = "Highly charged ion based time-of-flight emission microscope",
year = "2000",
journal = "Review of Scientific Instruments",
volume = "71(5)",
pages = "2077-2081",
DOI = "10.1016/S1567-1739(02)00231-6",
author = "A.V. Hamza and A.V. Barnes and E.&nbsp;Magee and M.&nbsp;Newman and T.&nbsp;Schenkel and J.W. McDonald and D.H. Schneider",
}

@article{ Schenkel2000_NIMB,
title = "Electronic sputtering of solids by slow, highly charged ions: Fundamentals and applications",
year = "2000",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "161-163",
pages = "65-75",
DOI = "10.1016/S0168-583X(99)00880-0",
author = "T.&nbsp;Schenkel and M.W. Newman and T.R. Niedermayr and G.A. Machicoane and J.W. McDonald and A.V. Barnes and A.V. Hamza and J.C. Banks and B.L. Doyle and K.J. Wu",
}

@article{ Schlathoelter2000_EPJD,
title = "Hydrogenated carbon clusters produced by highly charged ion impact on solid $C_84$",
year = "2000",
journal = "The European Physical Journal D",
volume = "12",
pages = "323-327",
DOI = "",
author = "T.&nbsp;Schlath<span class="bibtex-protected">ö</span>lter and M.W. Newman and T.R. Niedermayr and G.A. Machicoane and J.W. McDonald and T.&nbsp;Schenkel and R.&nbsp;Hoekstra and A.V. Hamza",
}

@article{ Schenkel2000_JoCP,
title = "Influence of hydrogen on the stability of positively charged silicon dioxide clusters",
year = "2000",
journal = "Journal of Chemical Physics",
volume = "113(6)",
pages = "2419-2422",
DOI = "10.1016/j.theochem.2009.11.005",
author = "T.&nbsp;Schenkel and T.&nbsp;Schlath<span class="bibtex-protected">ö</span>lter and M.W. Newman and G.A. Machicoane and J.W. McDonald and A.V. Hamza",
}

@article{ Schenkel:PiSS-61-23,
title = "Interaction of slow, very highly charged ions with surfaces",
year = "1999",
journal = "Progress in Surface Science",
volume = "61",
pages = "23-84",
DOI = "10.1016/S0079-6816(99)00009-X",
author = "T.&nbsp;Schenkel and A.V. Hamza and A.V. Barnes and D.H. Schneider",
}

@article{ Hamza1999_EPJD,
title = "Dependence of cluster ion emission form uranium oxide surfaces on the charge state of the incident slow highly charged ion",
year = "1999",
journal = "The European Physical Journal D",
volume = "6",
pages = "83-87",
DOI = "",
author = "A.V. Hamza and T.&nbsp;Schenkel and A.V. Barnes",
}

@article{ Schenkel1999_PS,
title = "Surface Analysis by Highly Charged Ion Based Secondary Ion Mass Spectrometry",
year = "1999",
journal = "Physica Scripta",
volume = "T80",
pages = "73-75",
DOI = "",
author = "T.&nbsp;Schenkel and A.V. Hamza and A.V. Barnes and M.W. Newman and G.&nbsp;Machicoane and T.&nbsp;Niedermayer and M.&nbsp;Hattass and J.W. McDonald and D.H. Schneider and K.J. Wu and R.W. Odom",
}

@article{ Schenkel:PRL-83-4273,
title = "Deposition of Potential Energy in Solids by Slow, Highly Charged Ions",
year = "1999",
journal = "Physical Review Letters",
volume = "83",
pages = "4273-4276",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.83.4273",
doi = "10.1103/PhysRevLett.83.4273",
author = "T.&nbsp;Schenkel and A.V. Barnes and T.R. Niedermayer and M.&nbsp;Hattass and M.W. Newman and G.A. Machicoane and J.W. McDonald and A.V. Hamza and D.H. Schneider",
}

@article{ Hattass:PRL-82-4795,
title = "Charge Equilibration Time of Slow, Highly Charged Ions in Solids",
year = "1999",
journal = "Physical Review Letters",
volume = "82",
pages = "4795-4798",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.82.4795",
doi = "10.1103/PhysRevLett.82.4795",
author = "M.&nbsp;Hattass and T.&nbsp;Schenkel and A.V. Hamza and A.V. Barnes and M.W. Newman and J.W. McDonald and T.R. Niedermayer and G.A. Machicoane and D.H. Schneider",
}

@article{ Schenkel1999_JVSTB,
title = "Analysis of submicron $Cu-Ta-SiO_2$ structures by highly charged ion secondary ion mass spectroscopy",
year = "1999",
journal = "Journal of Vacuum Science and Technology B",
volume = "17",
pages = "2331-2335",
DOI = "10.1116/1.590913",
author = "T.&nbsp;Schenkel and K.J. Wu and J.&nbsp;Li and N.&nbsp;Newman and A.V. Barnes and J.W. McDonald and A.V. Hamza",
}

@article{ Hamza1999_JVSTA,
title = "Secondary ion coincidence in highly charged ion based secondary ion mass spectroscopy for process characterization",
year = "1998",
journal = "Journal of Vacuum Science and Technology A",
volume = "17",
pages = "303-305",
doi = "10.1116/1.582026",
author = "A.V. Hamza and T.&nbsp;Schenkel and A.V. Barnes and D.H. Schneider",
}

@article{ Schenkel1998_JVSTA,
title = "Analysis of $B-SiO_2$ films by highly charged ion based time-of-flight secondary ion mass spectrometry, standard secondary ion mass spectrometry and elastic recoil detection",
year = "1998",
journal = "Journal of Vacuum Science and Technology A",
volume = "16",
pages = "1384-1387",
doi = "10.1116/1.581523",
author = "T.&nbsp;Schenkel and A.V. Hamza and A.V. Barnes and D.S. Walsh and B.L. Doyle and D.H. Schneider",
}

@article{ Schenkel1998_JVSTB,
title = "Electronic desorption of alkyl monolayers from silicon by very highly charged ions",
year = "1998",
journal = "Journal of Vacuum Science and Technology B",
volume = "16",
pages = "3298-3301",
doi = "10.1088/0953-8984/21/22/224012",
author = "T.&nbsp;Schenkel and M.&nbsp;Schneider and M.&nbsp;Hattass and M.W. Newman and A.V. Barnes and A.V. Hamza and D.H. Schneider and R.L. Cicero and C.E.D. Chidsey",
}

@article{ Schenkel1998_EPJD,
title = "Cluster ion emission in the interaction of slow highly charged ions with surfaces",
year = "1998",
journal = "The European Physical Journal D",
volume = "1",
pages = "297-302",
doi = "10.1007/s100530050096",
author = "T.&nbsp;Schenkel and A.V. Barnes and A.V. Hamza and D.H. Schneider",
}

@article{ Schenkel:PRL-80-4325,
title = "Synergy of Electronic Excitations and Elastic Collision Spikes in Sputtering of Heavy Metal Oxides",
year = "1998",
journal = "Physcial Review Letters",
volume = "80",
pages = "4325-438",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.80.4325",
doi = "10.1103/PhysRevLett.80.4325",
author = "T.&nbsp;Schenkel and A.V. Barnes and A.V. Hamza and D.H. Schneider and J.C. Banks and B.L. Doyle",
}

@article{ Schenkel:PRL-81-2590,
title = "Ablation of GaAs by Intense, Ultrafast Electronic Excitation from Highly Charged Ions",
year = "1998",
journal = "Physcial Review Letters",
volume = "81",
pages = "2590-2593",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.81.2590",
doi = "10.1103/PhysRevLett.81.2590",
author = "T.&nbsp;Schenkel and A.V. Hamza and A.V. Barnes and D.H. Schneider and J.C. Banks and B.L. Doyle",
}

@article{ Schenkel1997_NIMB,
title = "Emission of secondary particles from metals and insulators at impact of slow highly charged ions",
year = "1997",
journal = "Nuclear Instruments and Methods in Physics Research B",
volume = "125",
pages = "153-158",
DOI = "10.1016/S0168-583X(96)00930-5",
author = "T.&nbsp;Schenkel and A.V. Barnes and M.A. Briere and A.&nbsp;Hamza and A.&nbsp;Schachvon Wittenau and D.H. Schneider",
}

@article{ Schenkel:PRL-78-2481,
title = "Electronic Sputtering of Thin Conductors by Neutralization of slow Highly Charged Ions",
year = "1997",
journal = "Physical Review Letters",
volume = "78",
pages = "2481-2484",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.78.2481",
doi = "10.1103/PhysRevLett.78.2481",
author = "T.&nbsp;Schenkel and M.A. Briere and H.&nbsp;Schmidt-B<span class="bibtex-protected">ö</span>cking and K.&nbsp;Bethge and D.H. Schneider",
}

@article{ Schenkel:PRL-79-2030,
title = "Charge State Depenent Energy Loss of Slow Heavy Ions in Solids",
year = "1997",
journal = "Physical Review Letters",
volume = "79",
pages = "2030-2033",
url = "http://link.aps.org/doi/10.1103/PhysRevLett.79.2030",
doi = "10.1103/PhysRevLett.79.2030",
author = "T.&nbsp;Schenkel and M.A. Briere and A.V. Barnes and A.V. Hamza and K.&nbsp;Bethge and H.&nbsp;Schmidt-B<span class="bibtex-protected">ö</span>cking and D.H. Schneider",
}

@article{ Briere1997_PS,
title = "Non-equilibrium energy loss for very highly charged ions in insulators",
year = "1997",
journal = "Physica Scripta",
volume = "T73",
pages = "324-325",
DOI = "",
author = "M.A. Briere and T.&nbsp;Schenkel and D.H. Schneider and P.&nbsp;Bauer and A.&nbsp;Arnau",
}

@article{ Schenkel1997_MSF,
title = "Electronic sputtering and desorption effects in TOF-SIMS studies using slow highly charged ions like Au69+",
year = "1997",
journal = "Materials Science Forum",
volume = "248-249",
pages = "413-417",
DOI = "10.4028/www.scientific.net/MSF.248-249.413",
author = "T.&nbsp;Schenkel and M.A. Briere and H.&nbsp;Schmidt-B<span class="bibtex-protected">ö</span>cking and K.&nbsp;Bethge and D.H. Schneider",
}

@article{ Schenkel:PRA-56-R1701,
title = "Energy loss of slow, highly charged ions in solids",
year = "1997",
journal = "Physical Review A",
volume = "56",
pages = "R1701-R1704",
url = "http://link.aps.org/doi/10.1103/PhysRevA.56.R1701",
doi = "10.1103/PhysRevA.56.R1701",
author = "A.V.&nbsp;Hamza T.&nbsp;Schenkel and A.V. Barnes and D.H. Schneider",
}

@inproceedings{ Briere1997,
booktitle = "Proceedings 10th International Conference on Secondary Ion Mass Spectrometry, SIMS X",
pages = "212",
year = "1997",
author = "M.A. Briere and T.&nbsp;Schenkel and D.H. Schneider",
}

@inproceedings{ Schenkel1995,
title = "",
year = "1995",
booktitle = "Proceedings of the 43rd ASMS Conference on Mass Spectrometry and Allied Topics",
pages = "1336",
author = "T.&nbsp;Schenkel and M.A. Briere and A.E. <span class="bibtex-protected">Schach von Wittenau</span> and D.&nbsp;Schneider",
}